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1

Improving aluminum nitride plasma etch process for MEMS applications

Bliznetsov, Vladimir, Johari, Badrul Hisam Bin, Chentir, Mohamed Tahar, Li, Wei Hong, Wong, Lai Yin, Merugu, Srinivas, Zhang, Xiao Lin, Singh, Navab

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 509 KB

english, 2013

2

Demonstration of color display metasurfaces via immersion lithography on a 12-inch silicon wafer

Hu, Ting, Tseng, Chih-Kuo, Fu, Yuan Hsing, Xu, Zhengji, Dong, Yuan, Wang, Shijie, Lai, Keng Heng, Bliznetsov, Vladimir, Zhu, Shiyang, Lin, Qunying, Gu, Yuandong

Journal:

Year:

2018

Language:

english

File:

PDF, 2.88 MB

english, 2018

3

Process improvement of 0.13 μm Cu/Low K (Black DiamondTM) dual damascene interconnection

H.Y. Li, Y.J. Su, C.F. Tsang, S.M. Sohan, V. Bliznetsov, L. Zhang

Journal:

Microelectronics Reliability

Year:

2005

Language:

english

File:

PDF, 1.11 MB

english, 2005

4

Investigation of etching properties of metal nitride/high-k gate stacks using inductively coupled plasma

Hwang, Wan Sik, Chen, Jinghao, Yoo, Won Jong, Bliznetsov, Vladimir

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2005

Language:

english

File:

PDF, 678 KB

english, 2005

5

Acid-base buffer characteristics of soils of spruce rhizosphere in the AE-horizon of podzolic soil

Maksimova, Yu. G., Rusakova, E. S., Tolpeshta, I. I., Sokolova, T. A., Bliznetsov, K. Yu., Mokrousova, P. A.

Journal:

Moscow University Soil Science Bulletin

Year:

2012

Language:

english

File:

PDF, 138 KB

english, 2012

6

[IEEE 2016 IEEE 18th Electronics Packaging Technology Conference (EPTC) - Singapore, Singapore (2016.11.30-2016.12.3)] 2016 IEEE 18th Electronics Packaging Technology Conference (EPTC) - Plasma etching of SiO2 with tapered sidewall for thin film encapsulation

Bliznetsov, Vladimir, Li, Bin, Lee, Jae-Wung, Lin, Huamao

Year:

2016

Language:

english

File:

PDF, 1.66 MB

english, 2016

7

Acousto-optical spectrum analysis of ultra-high-frequency radio-wave analogue signals with an improved resolution exploiting the collinear acoustic wave heterodyning

Alexandre S. Shcherbakov, Alexey M. Bliznetsov, Abraham Luna Castellanos, Daniel Sanchez Lucero

Journal:

Optik - International Journal for Light and Electron Optics

Year:

2010

Language:

english

File:

PDF, 378 KB

english, 2010

8

Study and improvement of electrical performance of 130 nm Cu/CVD low k SiOCH interconnect related to via etch process

C.F. Tsang, V.N. Bliznetsov, Y.J. Su

Journal:

Microelectronics Journal

Year:

2003

Language:

english

File:

PDF, 548 KB

english, 2003

9

MEMS Industry-Worth Etching to Fabricate Tapered Structures in SiO 2

Bliznetsov, Vladimir, Li, Bin, Lee, Jae Wung, Lin, Huamao

Journal:

Journal of Microelectromechanical Systems

Year:

2017

Language:

english

File:

PDF, 2.31 MB

english, 2017

10

[IEEE 2014 IEEE 16th Electronics Packaging Technology Conference (EPTC) - Singapore (2014.12.3-2014.12.5)] 2014 IEEE 16th Electronics Packaging Technology Conference (EPTC) - Comparison of aluminum post etch cleaning on MEMS structures using formulated organic solvent cleaners

Steven, Lee Hou Jang, Bliznetsov, Vladimir, Wei, Deng, Dexian, Tham, Wickramanayaka, Sunil

Year:

2014

Language:

english

File:

PDF, 845 KB

english, 2014

11

[IEEE 2013 IEEE 15th Electronics Packaging Technology Conference (EPTC 2013) - Singapore (2013.12.11-2013.12.13)] 2013 IEEE 15th Electronics Packaging Technology Conference (EPTC 2013) - Control of corrosion on aluminum MEMS structures after post etch clean

Jang Steven, Lee Hou, Tan, Andrew, Wei, Deng, Bliznetsov, Vladimir, Dexian, Tham, Singh, Navab, Murthy, Ramana, Tan, Eugene

Year:

2013

File:

PDF, 832 KB

2013

12

A method of fabricating metal-insulator-metal (MIM) capacitor in Cu/low-k backend interconnection process for RF application

M.B. Yu, Jiang Ning, S. Balakumar, V.N. Bliznetsov, G.Q. Lo, N. Balasubramanian, D.L. Kwong

Journal:

Thin Solid Films

Year:

2006

Language:

english

File:

PDF, 993 KB

english, 2006

13

[IEEE IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits - Singapore (7-11 July 2003)] Proceedings of the 10th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2003 - 130 nm process technology integration of advanced Cu/CVD low k dielectric material-case study of failure analysis and yield enhancement

Tsang, C.F., Su, Y.J., Bliznetsov, V.N., Ang, G.T.

Year:

2003

Language:

english

File:

PDF, 625 KB

english, 2003

14

[IEEE IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest. - Tempe, Arizon, USA (Dec. 5, 2005)] IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest. - Thin body silicon-on-insulator N-MOSFET with silicon-carbon source/drain regions for performance enhancement

Kah-Wee Ang,, King-Jien Chui,, Bliznetsov, V., Yihua Wang,, Lai-Yin Wong,, Chih-Hang Tung,, Balasubramanian, N., Ming-Fu Li,, Samudra, G., Yee-Chia Yeo,

Year:

2005

Language:

english

File:

PDF, 2.26 MB

english, 2005

15

Deep trench etch and clean process technology for CU/SiOC passive device

M.B. Yu, V.N. Bliznetsov, C.K. Chang, B. Ramana Murthy

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 256 KB

english, 2004

16

High-throughput anisotropic plasma etching of polyimide for MEMS

Bliznetsov, Vladimir, Manickam, Anbumalar, Chen, Junwei, Ranganathan, Nagarajan

Journal:

Journal of Micromechanics and Microengineering

Year:

2011

Language:

english

File:

PDF, 522 KB

english, 2011

17

Integrated process of photoresist trimming and dielectric hard mask etching for sub-50 nm gate patterning

Vladimir Bliznetsov, Rakesh Kumar, Huizhen Lin, Kah-Wee Ang, Won Jong Yoo, Anyan Du

Journal:

Thin Solid Films

Year:

2006

Language:

english

File:

PDF, 241 KB

english, 2006

18

Modern preservative materials

T. A. Bliznetsov

Journal:

Year:

2007

Language:

english

File:

PDF, 61 KB

english, 2007

19

Plasma Etching for Sub-45-nm TaN Metal Gates on High-$k$ Dielectrics

Bliznetsov, Vladimir N., Bera, Lakshmi Kanta, Soo, Haw Yun, Balasubramanian, N., Kumar, Rakesh, Lo, Guo-Qiang, Yoo, Won Jong, Tung, Chih Hung, Linn, Linn

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2007

Language:

english

File:

PDF, 1.87 MB

english, 2007

20

Seismic monitoring of the Plosky Tolbachik eruption in 2012–2013 (Kamchatka Peninsula Russia)

Senyukov, S.L., Nuzhdina, I.N., Droznina, S.Ya., Garbuzova, V.T., Kozhevnikova, T.Yu., Sobolevskaya, O.V., Nazarova, Z.A., Bliznetsov, V.E.

Journal:

Journal of Volcanology and Geothermal Research

Year:

2015

Language:

english

File:

PDF, 6.52 MB

english, 2015

21

Effects of SiO[sub 2]∕Si[sub 3]N[sub 4] hard masks on etching properties of metal gates

W. S. Hwang, B. Cho, D. S. H. Chan, V. Bliznetsov, W. J. Yoo

Year:

2006

Language:

english

File:

PDF, 1.07 MB

english, 2006

22

Development of plasma etching process for sub-50 nm TaN gate

Vladimir Bliznetsov, Rakesh Kumar, Lakshmi Kanta Bera, Loh Wei Yip, Anyan Du, Tang Ern Hui

Journal:

Thin Solid Films

Year:

2006

Language:

english

File:

PDF, 317 KB

english, 2006

23

Interaction of dispersed water with flame

Yu. V. Alekhanov, M. V. Bliznetsov, Yu. A. Vlasov, V. I. Dudin, A. E. Levushov, A. I. Logvinov, S. A. Lomtev, E. E. Meshkov

Journal:

Technical Physics Letters

Year:

2003

Language:

english

File:

PDF, 202 KB

english, 2003

24

Crustal structure of the Middle Urals based on seismic reflection data

Kashubin, S., Juhlin, C., Friberg, M., Rybalka, A., Petrov, G., Kashubin, A., Bliznetsov, M., Steer, D.

Journal:

Geological Society London Memoirs

Year:

2006

Language:

english

File:

PDF, 24.51 MB

english, 2006

25

Deep SiO 2 etching with Al and AlN masks for MEMS devices

Bliznetsov, Vladimir, Lin, Hua Mao, Zhang, Yue Jia, Johnson, David

Journal:

Journal of Micromechanics and Microengineering

Year:

2015

Language:

english

File:

PDF, 2.04 MB

english, 2015

26

Comparative studies of physical and chemical properties of plasma-treated CVD low k SiOCH dielectrics

C.F. Tsang, Y.J. Su, V.N. Bliznetsov

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 382 KB

english, 2004

27

The effect of turbulent mixing on the moving liquid layer energy conversion into the internal energy of a compressed gas and the character of the gas compression

M. V. Bliznetsov, I. G. Zhidov, E. E. Meshkov, N. V. Nevmerzhitskii, E. D. Sen’kovskii, E. A. Sotskov, V. A. Til’kunov

Journal:

Technical Physics Letters

Year:

2002

Language:

english

File:

PDF, 43 KB

english, 2002

28

Development of new preservatives

T. A. Bliznetsov

Journal:

Year:

2006

Language:

english

File:

PDF, 60 KB

english, 2006

29

Integrated geological and geophysical studies in the SG4 borehole area, Tagil Volcanic Arc, Middle Urals: Location of seismic reflectors and source of the reflectivity

Ayarza, P., Juhlin, C., Brown, D., Beckholmen, M., Kimbell, G., Pechnig, R., Pevzner, L., Pevzner, R., Ayala, C., Bliznetsov, M., Glushkov, A., Rybalka, A.

Journal:

Journal of Geophysical Research

Year:

2000

Language:

english

File:

PDF, 2.76 MB

english, 2000

30

Etching of TiN-based gates for advanced complementary metal-oxide-semiconductor devices

V. Bliznetsov, N. Singh, R. Kumar, N. Balasubramanian, P. Guo, S. J. Lee, Y. Cai

Year:

2008

Language:

english

File:

PDF, 960 KB

english, 2008

31

CMOS-compatible a-Si metalenses on a 12-inch glass wafer for fingerprint imaging

Hu, Ting, Zhong, Qize, Li, Nanxi, Dong, Yuan, Xu, Zhengji, Fu, Yuan Hsing, Li, Dongdong, Bliznetsov, Vladimir, Zhou, Yanyan, Lai, Keng Heng, Lin, Qunying, Zhu, Shiyang, Singh, Navab

Journal:

Year:

2020

Language:

english

File:

PDF, 3.03 MB

english, 2020

32

Method for Studying the Interaction of Dispersed Water with Flame

Yu. V. Alekhanov, M. V. Bliznetsov, Yu. A. Vlasov, S. I. Gerasimov, V. I. Dudin, A. E. Levushov, A. I. Logvinov, S. A. Lomtev, V. V. Marmyshev, E. E. Meshkov, Yu. K. Semenov, S. V. Tsykin

Journal:

Combustion, Explosion, and Shock Waves

Year:

2006

Language:

english

File:

PDF, 838 KB

english, 2006

33

Imaging of crustal structures from vertical array measurements

H.-P. Harjes, M. Janik, J. Müller, M. Bliznetsov

Journal:

Year:

1998

Language:

english

File:

PDF, 681 KB

english, 1998

34

Design specific variation in via/contact pattern transfer: Full chip analysis

J. Choy, V. Sukharev, A. Markosian, A. Kteyan, Y. Granik, V. Bliznetsov

Year:

2009

Language:

english

File:

PDF, 1.07 MB

english, 2009

35

Analyses of wavefields by the common excitation array (CEA) method

Michael Bliznetsov, Christopher Juhlin

Journal:

Journal of Applied Geophysics

Year:

1994

Language:

english

File:

PDF, 1.21 MB

english, 1994

36

[IEEE 5th Electronics Packaging Technology Conference (EPTC 2003) - Singapore (10-12 Dec. 2003)] Proceedings of the 5th Electronics Packaging Technology Conference (EPTC 2003) - Failure analysis for the 0.13 ?m Cu/low k (Black Diamond/spl trade/) interconnection by the passive voltage contrast

Li Hongyu,, Su Yong Jie,, Tsang Chi Fo,, Patrick, Y.W.C., Koh Mei Ling,, Wong Lai Yin,, Tang Leijun,, Li Wei Hong,, Chang Chang Kuo,, Bliznetsov, V., Lin, Z.

Year:

2003

Language:

english

File:

PDF, 198 KB

english, 2003

37

[AIP ZABABAKHIN SCIENTIFIC TALKS - 2005: International Conference on High Energy Density Physics - Snezhinsk (Russia) (5-10 September 2005)] AIP Conference Proceedings - Study of viscosity effect on turbulent mixing development at the gas-liquid interface

Bliznetsov, M. V.

Year:

2006

Language:

english

File:

PDF, 504 KB

english, 2006

38

Challenges in Etching of OSG Low- K Materials for Dual-Damascene Metallization

Bliznetsov, Vladimir N., Mukherjee-Roy, Moitreyee, Wing, Leong Yew, Teck, Ng Beng, Chuan, Yew Wee

Journal:

MRS Proceedings

Year:

2002

Language:

english

File:

PDF, 292 KB

english, 2002

39

Crustal evolution of the Middle Urals based on seismic reflection and refraction data

C. Juhlin, J.H. Knapp, S. Kashubin, M. Bliznetsov

Journal:

Year:

1996

Language:

english

File:

PDF, 1.33 MB

english, 1996

40

Seismic monitoring of the Plosky Tolbachik eruption in 2012–2013 (Kamchatka Peninsula Russia)

Senyukov, S.L., Nuzhdina, I.N., Droznina, S.Ya., Garbuzova, V.T., Kozhevnikova, T.Yu., Sobolevskaya, O.V., Nazarova, Z.A., Bliznetsov, V.E.

Journal:

Journal of Volcanology and Geothermal Research

Year:

2015

Language:

english

File:

PDF, 2.66 MB

english, 2015

41

Europrobe seismic reflection profiling across the eastern Middle Urals and West Siberian Basin

M. Friberg, C. Juhlin, A.G. Green, H. Horstmeyer, J. Roth, A. Rybalka, M. Bliznetsov

Journal:

Year:

2000

Language:

english

File:

PDF, 1.82 MB

english, 2000

42

[AIP ZABABAKHIN SCIENTIFIC TALKS - 2005: International Conference on High Energy Density Physics - Snezhinsk (Russia) (5-10 September 2005)] AIP Conference Proceedings - Study of Turbulent Mixing Development at the Gas-Gas Interface of Shock Wave at Mach Numbers from 2–9

Bliznetsov, M. V.

Year:

2006

Language:

english

File:

PDF, 7.74 MB

english, 2006

43

Si metasurface half-wave plates demonstrated on a 12-inch CMOS platform

Dong, Yuan, Xu, Zhengji, Li, Nanxi, Tong, Jinchao, Fu, Yuan Hsing, Zhou, Yanyan, Hu, Ting, Zhong, Qize, Bliznetsov, Vladimir, Zhu, Shiyang, Lin, Qunying, Zhang, Dao Hua, Gu, Yuandong, Singh, Navab

Journal:

Year:

2019

Language:

english

File:

PDF, 1.95 MB

english, 2019

44

Lattice strain analysis of transistor structures with silicon–germanium and silicon–carbon source∕drain stressors

K. Ang, K. Chui, V. Bliznetsov, C. Tung, A. Du, N. Balasubramanian, G. Samudra, M. F. Li, Y. Yeo

Journal:

Applied Physics Letters

Year:

2005

Language:

english

File:

PDF, 574 KB

english, 2005

45

ADAP software for automatic detection of ash emission at active volcanoes and calculations of ash plume height using seismological data

V. E. Bliznetsov,S. L. Senyukov

Journal:

Seismic Instruments

Year:

2016

Language:

english

File:

PDF, 2.74 MB

english, 2016

46

Real-Time Analysis of the Cytopathic Effect of African Swine Fever Virus

Burmakina, Galina, Bliznetsov, Kirill, Malogolovkin, Alexander

Journal:

Journal of Virological Methods

Year:

2018

Language:

english

File:

PDF, 345 KB

english, 2018

47

Seismic imaging of reflectors in the SG4 borehole, Middle Urals, Russia

C. Juhlin, M. Bliznetsov, L. Pevzner, T. Hismatulin, A. Rybalka, A. Glushkov

Journal:

Year:

1997

Language:

english

File:

PDF, 1.58 MB

english, 1997

48

A Dual BARC method for Lithography and Etch for Dual Damascene with Low K

Roy, Moitreyee, Bliznetsov, Vladimir, Samudra, Ganesh

Journal:

Japanese Journal of Applied Physics

Year:

2003

Language:

english

File:

PDF, 242 KB

english, 2003

49

SPIE Proceedings [SPIE International Symposium on Microelectronics and Assembly - Singapore, Singapore (Monday 27 November 2000)] Advanced Microelectronic Processing Techniques - Plasma removal of post-RIE residues for dual-damascence processing

Bliznetsov, Vladimir N., Jo, Woo-Min, Harrison, H. Barry, Wee, Andrew T. S., Gupta, Subhash

Year:

2000

Language:

english

File:

PDF, 419 KB

english, 2000

50

SPIE Proceedings [SPIE International Conference on Microelectronics - Warsaw, Poland (Monday 21 September 1992)] International Conference of Microelectronics: Microelectronics '92 - Reactive ion etching of deep trenches in silicon

Bliznetsov, Vladimir N., Gutshin, Oleg P., Yachmenev, V., Sowinski, Andrzej, Grzybowski, Jan, Kucharski, Witold T., Romaniuk, Ryszard S.

Year:

1992

Language:

english

File:

PDF, 268 KB

english, 1992

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